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originally published August 2011
The purpose of this Document is to provide guidelines for organosilicate precursors used in Low K CVD processes and to standardize testing procedures to support those requirements
1 This Guide provides the tools to describe individual wafers in a 3DS-IC process
This Document also provides a guide for grades of trimethylborate for which an industry need has been identified
SEMI C93-0216 (Preliminary) (first published)
C00324 - SEMI C3.24 - Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality Revision:SEMI C3.24-0414 (Reapproved 0319)E - Current originally published August 2011The purpose of this Document is to provide specifications for sulfur hexafluoride (SF6) that is used in the semiconductor industry. This Document covers requirements for sulfur hexafluoride used in the semiconductor industry. Referenced SEMI Standards SEMI C3 Specification for Gases