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C00606 - SEMI C6.6 - Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas StdPbc-1119 SEMI 3D3-0613 (first published)

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SEMI 3D3-0613 (first published)

that is used in the semiconductor industry

D32で規定されたベア・ガラスIDの位置の規定は一箇所であり,大型化に伴い運用効率上複数の基板IDが必要である。そのため,D32を基本として効率的な運用を行える基板ID位置を規定するものである。

SEMI E43 — Guide for Electrostatic Measurements on Objects and Surfaces

此類名稱與定義說明了使用在液晶顯示器光源之背光模組的各種元件和特性。本標準有助於統一使用在背光模組的專用術語,以節省製造成本和時間,而改善製造效率。

C00606 - SEMI C6.6 - Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas StdPbc-1119 SEMI 3D3-0613 (first published)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in November 2011; originally published in 1990; previously published November 2002. NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI C97. The purposes

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