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This Document is intended for point of use (POU) inert gas purifiers where inlet purity is 99
This Test Method requires the use of an oxygen-free reference specimen
SEMI E132-0305 (designation update)
Each tool should be supplied in a ‘facility ready’ state
and is limited to silicon with doping concentrations less than about 1 × 1017 atoms/cm3
M00800 - SEMI M8 - Specification for Polished Monocrystalline Silicon Test Wafers Revision:SEMI M8-0312 (Reapproved 1023) - Current This Document is intended forThis Specification covers dimensional and crystallographic properties of monocrystalline virgin silicon test wafers together with selected electrical and surface defect characteristics. This Specification covers virgin test wafers in all standard wafer diameters from 2 inch to 300 mm. It classifies test wafers according to the items specified. It provides three classes of smaller diameter test wafers (through 125 mm), and two classes of larger