F07400 - SEMI F74 - Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems Revision:SEMI F74-1103 (Reapproved 0710) - Inactive Application of this Test Method

Application of this Test Method is expected to yield comparable data among process panels tested for the purposes of qualification for this installation

SEMI C33-0301 (technical revision)

SEMI C29-0699 (first published - replaces SEMI C7

2  These test methods can be applied in research and development

SEMI E84-1109 (technical revision)

F07400 - SEMI F74 - Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems Revision:SEMI F74-1103 (Reapproved 0710) - Inactive Application of this Test MethodThis document is a test method for evaluating metal seal designs use in gas delivery systems. It covers both surface mounted gas systems and conventional metal face seal fitting systems. Referenced SEMI Standards SEMI E49 Guide for High Purity and Ultrahigh Purity Piping Performance Subassemblies, and Final Assemblies SEMI F1 Specification for Leak Integrity of High Purity Gas Piping Systems and Components