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E02400 - SEMI E24 - Cluster Tool Module Interface: Isolation Valve Interlocks Standard StdVol-Gases 1 Electronic paper displays use

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Description

1  Electronic paper displays use reflective technology to create images and need no power to hold images because of their bistable nature

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E02400 - SEMI E24 - Cluster Tool Module Interface: Isolation Valve Interlocks Standard StdVol-Gases 1 Electronic paper displays useThis standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www. semi. org in June 2010. Originally published in 1992; previously published July 2004. NOTICE: This document was balloted and approved for withdrawal in 2010. The purpose of this standard is to prevent any opening or closing of

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