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• A communication interface that transfers general-purpose data between equipment or between the host and equipment
Clear and commonly accepted definitions are needed for efficient communication and to prevent misunderstanding between buyers and vendors of metrology equipment and manufacturing services
originally published in 1990
on the other hand
SEMI C90 — Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems
C00302 - SEMI C3.2 - Specification for Arsine (AsH3) in Cylinders, 99.94% Quality StdPbc-0624 • A communication interface thatThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in February 2018; originally published in 1992; previously published June 2011. The purpose of this Document is to provide specifications for arsine (AsH3) that is used in the semiconductor industry. This Document
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