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SEMI E19 — Specification for Standard Mechanical Interface (SMIF)
• Interface sensor unit size to be located at load port defined by SEMI E15
SEMI M13-0706 (technical revision)
transport and storage system controller architecture
The purpose of this Document is to provide a specification for boron trifluoride (BF3) used in the semiconductor industry
G09400 - SEMI G94 - Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer Revision:SEMI G94-0113 - Superseded SEMI E19 — Specification forThis Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment. This Standard specifies the requirements for wafer spacers used for separation of wafers and for a cushion material used for wafer protection. This Standard specifies the electrical characteristics and requirements for hazardous substance for the material of container. The
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