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単位 － SI単位系を使用する。
originally published by ASTM International as ASTM F534-77T
SEMI MF95 — Test Method for Thickness of Epitaxial Layers of Silicon on Substrates of the Same Type by Infrared Reflectance
2 Hydrogen (H2) Delivered as Pipeline Gas
D01700 - SEMI D17 - FPDガラス基板搬送用カセットの機械的仕様 StdPbc-0220 at a delivery point agreedGlobal Flat Panel Display Equipment CommitteeNorth American Flat Panel Display Committee19991215North American Regional Standards Committee20001SEMI On Line2000219989 FPD SEMI D18 Referenced SEMI Standards SEMI D18 Specification for Cassettes Used for Horizontal Transport and Storage of Flat Panel Display Substrates SEMI E15 Specification for Tool Load Port
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