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which is used in the semiconductor industry for the deposition of aluminium metal by vapor deposition techniques and aluminium oxide based layers by atomic layer deposition
The orientation of semiconductor crystals and wafers as determined by these test methods is an important materials acceptance requirement because the orientation controls various parameters of semiconductor devices fabricated from the material
The purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self-Description
SEMI E90-0301 (technical revision)
SEMI G82 — Provisional Specification for 300 mm Load Port for Frame Cassettes in Backend Process
F04000 - SEMI F40 - Practice for Preparing Liquid Chemical Distribution Components and Neat Polymers for Chemical Testing StdVol-HB-LED which is used in theE This Standard was editorially modified in June 2022 to correct an error. A change was made to 10. 4. 2. This Practice defines preparation and pretreatment procedures for chemical test methods used to evaluate liquid chemical distribution system components and neat polymer used in their manufacture. This Practice includes preparation procedures that can be applied to components such as tubing, piping, valves, regulators, fittings, gaskets, O rings,
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