HB00500 - SEMI HB5 - Test Method for Measurement of Saw Marks on Crystalline Sapphire Wafers by Using Optical Probes StdTpc-Cluster Tools SEMI G71-0996 (Reapproved 0823)

SEMI G71-0996 (Reapproved 0823)

SEMI M13-0706 (Reapproved 0318)

SEMI E99-0623 (technical revision)

The results of the test will also be useful in the comparison of MFCs

SEMI E92-0302E (Reapproved 0615)

HB00500 - SEMI HB5 - Test Method for Measurement of Saw Marks on Crystalline Sapphire Wafers by Using Optical Probes StdTpc-Cluster Tools SEMI G71-0996 (Reapproved 0823)This Standard was technically approved by the HB LED Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www. semiviews. org and www. semi. org in June 2015. Crystalline sapphire wafers (CSW) are used as substrates for manufacturing compound semiconductor devices, in particular high brightness light emitting diodes (HB LED). In SEMI HB1 a multitude of