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2 — Guide for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment
The procedure for generating the set of ConRefs is based on interlaboratory testing in accordance with ASTM E691
本標準應用在平面顯示器。本標準主要處理
specifically for serial identification of flatted and notched silicon wafers
Quality control using computers
HB00400 - SEMI HB4 - Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI) StdPbc-0714 2 — Guide for theThe purpose of this Standard is to define the equipment automation interface for communication and control of process, automation and metrology equipment used in high brightness light emitting diode (HB LED) manufacturing. It intends to produce economic benefits for both manufacturers and equipment suppliers by identifying a subset of relevant functionalities out of the existing SEMI Communications Standards for the application in HB LED manufacturing
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