F06200 - SEMI F62 - Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects StdTpc-Ball Grid Arrays and out of

and out of

This Test Method is referred to as a preferred method of RF power measurement for conforming to SEMI E113

SEMI M8-1296 (technical revision)

This Test Method defines a procedure for the evaluation of die strength by the mean of 3-point bending method

SEMI F32 — Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves

F06200 - SEMI F62 - Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects StdTpc-Ball Grid Arrays and out ofThis Standard defines a method for testing mass flow controllers (MFCs) being considered for installation into a gas distribution system and to quantify ambient and gas temperature effects on the MFCs indicated and actual flow. This Test Method applies to metal and polymer sealed MFCs. The tests include those listed below and are to be performed in the following order: 1. Ambient Temperature Effects (Steady State and Transient) 2. Gas Temperature