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E15200 - SEMI E152 - 150 mm EUVLレチクル用EUVポッドの機械仕様 Revision:SEMI E152-0709 - Superseded 20-1107 (first published)

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Description

20-1107 (first published)

This Specification provides the structure of SEMIs Sensor/Actuator Network (SAN) Standard

and other methods of measuring electrostatic parameters

• Storage of the master copies of the recipes are centralized to Recipe Server in RMS (Recipe Server Centric concept)

This Standard is applicable to the terminology of color breakup on the field sequential color display

E15200 - SEMI E152 - 150 mm EUVLレチクル用EUVポッドの機械仕様 Revision:SEMI E152-0709 - Superseded 20-1107 (first published)global Physical Interfaces & Carriers Committee2009513global Audits and Reviews Subcommittee20096www. semi. org20097CD ROM 6150 mmEUVLEUVEUVEUVEUVL Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassette Used to Transport and Store 300mm Wafers SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF) SEMI E57 Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers SEMI E100 Specification for a

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