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SEMI C93-0522 (technical revision)
including those widely used in 300 mm semiconductor factories
This Document is to provide a standard of monodispersed gold nanoparticle (GNP) challenge test for liquid filter rated 20 to 50 nm using optical liquid-borne particle counter
この文書はパイプラインを通して授受される酸素ガスにのみ適用される。シリンダ充填ガスや液体状態の酸素ガスには適用されない。
SEMI E79-0200 (technical revision)
E04900 - SEMI E49 - Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies StdPbc-0116 SEMI C93-0522 (technical revision)1 Purpose 1. 1 The purpose of this overview Standard is to provide a basic set of terminology and reference documents for SEMI E49. 2, SEMI E49. 4, SEMI E49. 5, SEMI E49. 6, SEMI E49. 7, SEMI E49. 8 and SEMI E137. 2 Scope 2. 1 This Standard contains terminology and reference documents used in SEMI E49. 2, SEMI E49. 4, SEMI E49. 5, SEMI E49. 6, SEMI E49. 7, SEMI E49. 8, and SEMI E137, which will reference performance and method standards as well as
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