C02100 - SEMI C21 - Specification and Guide for Ammonium Hydroxide StdPbc-0421 This Guide applies to trace

This Guide applies to trace contaminants specified in SEMI Process Chemicals or Gases Standards and Guides

including lithography and electrical contact between metal layers on the bonded wafers

rotomolding

Recognizing the importance of impurity content of gases in the manufacture of semiconductors

SEMI 3D12 — Guide on Measuring Flatness and Shape of Low Stiffness Substrates

C02100 - SEMI C21 - Specification and Guide for Ammonium Hydroxide StdPbc-0421 This Guide applies to traceNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for ammonium hydroxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give