E03500 - SEMI E35 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment Revision:SEMI E35-0305 - Superseded previously published July 2006

previously published July 2006

polarizing film

SEMI半導体製造装置通信スタンダード2（SECS-II）は，インテリジェント装置とホスト間で交換するメッセージの解釈について詳細に定義している。本仕様は，日本電子工業振興協会（JEIDA）の第12委員会の協力により規定された。

SEMI E138-0709 (technical revision)

2 through SEMI E49

E03500 - SEMI E35 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment Revision:SEMI E35-0305 - Superseded previously published July 2006The purpose of this Guide is to provide standard cost of ownership (COO) metrics for evaluating unit production cost effectiveness of manufacturing equipment in the semiconductor and related industries. This Guide establishes a procedure to facilitate an understanding of equipment related costs, including costs related to environmental, health, and safety (EHS) factors, by providing definitions, classifications, algorithms, methods, and example values