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E18500 - SEMI E185 - Specification for 300 mm Tape Frame FOUP StdTpc-FPD Metrology data reports

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Description

data reports

1 — Specification for SOAP Binding of Data Collection Management (DCM)

SEMI MF1153-92 (Reapproved 2002) (first SEMI publication)

some equations for translation in the textile industry are open to the public

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E18500 - SEMI E185 - Specification for 300 mm Tape Frame FOUP StdTpc-FPD Metrology data reports1 Purpose 1. 1 The purpose of this Specification is to establish basic physical dimensions for the Tape Frame FOUP which is intended to be used to transport and store 300 mm tape frames, as specified by SEMI G74 and SEMI G87, within IC manufacturing facilities. 2 Scope 2. 1 This Standard specifies the external features and dimensions of the Tape Frame FOUP. 2. 2 This Standard specifies the internal dimensions for storing the tape frames in the Tape

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