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SEMI G90 — Specification for 300 mm Wafer Coin-Stack Type Shipping Container Used for Test and Packaging Processes
SEMI E30-0997 (technical revision)
SEMI E4-0699 (Reapproved 0612)
worldwide means for describing and measuring leak rates of mass flow controllers (MFCs)
This Standard defines one interface for all such carriers and for any carrier capacity (13 and 25 wafers)
D00700 - SEMI D7 - FPD用ガラス基板の表面粗さの測定方法 Revision:SEMI D7-94 (Reapproved 0703) - Inactive SEMI G90 — Specification forNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Flat Panel Display Global Technical CommitteeJapanese FPD Materials and Components Committee2003428Japanese Regional Standards Committee20037www. semi. org1994 NOTICE: This Standard or Safety Guideline has an Inactive Status because
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