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SEMI E111 — Mechanical Specification for a 150mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch Reticle
SEMI D44 — Specification for Reference Position of Single Substrate for Handing Off On Tool
SEMI D13 — Terminology for FPD Color Filter Assemblies
measurement relevance
SEMI E123-0703 (designation update)
C08600 - SEMI C86 - Guide for Ethylene Glycol StdPbc-0925 SEMI E111 — Mechanical SpecificationThe purpose of this Document is to provide a Guide for ethylene glycol for which a need has been identified. The scope of this Document covers grades of ethylene glycol which are used in the semiconductor industry. Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemical
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