F00800 - SEMI F8 - Test Method for Evaluating the Sealing Capabilities of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to Tensile Forces StdVol-MEMS SEMI E164-0414 (Reapproved 0721)

SEMI E164-0414 (Reapproved 0721)

エッジグリップハンドリングデバイスを使用したウェーハへのランダムアクセスは，本スタンダードの要求事項ではない。

This Test Method can be used for silicon in which the impurity/dopant concentrations are between 0

Device manufacturers use this standard when procuring processing equipment to specify to the equipment supplier the interface required for interchangeability of pumps

SEMI T11-0703 (Reapproved 0921)

F00800 - SEMI F8 - Test Method for Evaluating the Sealing Capabilities of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to Tensile Forces StdVol-MEMS SEMI E164-0414 (Reapproved 0721)This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www. semiviews. org and www. semi. org in June 2013. Originally published in 1992; previously published September 1998. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not