D05700 - SEMI D57 - Guide for Definition of Measurement Index Visual Contrast Threshold (VCT) for Mura in FPD Image Quality Inspection Revision:SEMI D57-0310 - Superseded Auto Transport Usage covers the

Auto Transport Usage covers the 125 mm wafer size

including light sources

個別に区別が必要なときにはベア・ガラス

Dry etch equipment

Specification will include detailed data structures in the form of inheritance and aggregation models that are common to all PCS FGs

D05700 - SEMI D57 - Guide for Definition of Measurement Index Visual Contrast Threshold (VCT) for Mura in FPD Image Quality Inspection Revision:SEMI D57-0310 - Superseded Auto Transport Usage covers theSpecific definitions and quantifications of Mura are not consistent for many FPD manufacturers. Though there are standards for quantification of Mura, they are only used for limited types of Mura and are not practical in real varied cases. Currently it is still difficult to implement instruments to replace human inspectors for Mura inspections of LCDs. Therefore, it is necessary to standardize the classification of Mura for LCD. This Standard focuses