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The purpose of this Document is to provide a guide for zirconium amides for which a need has been identified
SEMI M35 — Guide for Developing Specifications for Silicon Wafer Surface Features Detected by Automated Inspection
The scope of this Document covers MIBC which is used in the semiconductor industry
The SEMI Committee on Chemical Reagents began its efforts on etchants in 1979
The purposes of this Document are: (1) to set a maximum permissible particle concentration for 20/0
C02800 - SEMI C28 - Specification and Guide for Hydrofluoric Acid StdTpc-Terminology The purpose of this DocumentNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for hydrofluoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give