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G06200 - SEMI G62 - 銀めっきの試験方法 Revision:SEMI G62-95 (Reapproved 0811) - Superseded SEMI MF657

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Description

SEMI MF657

This Standard was editorial modified in October 2003 to correct general editorial errors

SEMI MF43 — Test Method for Resistivity of Semiconductor Materials

本書は8 × 105 Pa (8気圧)以下の圧力下で特殊ガスシステムから供給される引火性ガスにのみ適用する。この方法は8 × 105 Pa (8気圧)以上の圧力で高圧シリンダから直接サンプリングを行う場合には適していない。本書は下記に示すガスにのみ適用される。

This Test Method also describes use of a transfer sensor that is calibrated using a calorimeter and a working sensor that is calibrated using the transfer sensor

G06200 - SEMI G62 - 銀めっきの試験方法 Revision:SEMI G62-95 (Reapproved 0811) - Superseded SEMI MF657global Assembly & Packaging Technical Committee201171global Audits and Reviews Subcommittee20118www. semiviews. org www. semi. org199520023 : Referenced SEMI Standards SEMI G55 Test Method for Measurement of Silver Plating Brightness SEMI G56 Test Method for Measurement of Silver Plating Thickness

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